Electrostatic force due to electrification seriously influences microtribology such as the operation of micro machine. This is because electrostatic force is comparable with or even larger than the inertial force, for small parts of micro machine. The basic material for micro machine is insulator. The electrification by insulator is, however, not well understood, especially at the micro scale.
Aim of this study is to study an influence of electrification for the microtribology. Electrification on materials for micro machine is investigated on a micro scale, by using the micro-tribotester. The micro-tribotester measures the map of the electrification(electrostatic force), frictional force and wear (surface corrugation) on a micro scale in a controlled humidity and temperature. Also, the method to control the electrification is investigated, which contributes to establishing the technology to ensure operation of the micro machine.