3. Material Characterization by Scanning Probe Microscopes
3. Material Characterization by Scanning Probe Microscopes
Recent progress in micro-scale technology has created a need for new methods for characterizing mechanical properties. Three novel scanning probe microscopes have been developed to meet this demand.
An Atomic Force Microscope (AFM) with Lateral Modulation (LM-AFM) has been developed in which the sample vibrates laterally so that frictional forces may be measured almost independent of topography. Sub-surface defects and elasticity may be measured using a new Ultrasonic AFM in which the cantilever is vibrated at frequencies above the first resonance. Finally, a Phase Velocity Scanning (PVS) method, in which scanning interference fringes in laster light are used for the non-contact generation of ultrasound, has been developed for the characterization of thin films and ion implanted layers of micron-order thickness.
