1. Micro Mechanism Design Technology
1. Micro Mechanism Design Technology
Fundamental research on micro-mechanism technology is in progress towards producing durable and practical micro-machines.
In a micro-machine, inertial forces are usually small compared to surface forces such as friction. The tribological characteristics of small contact surfaces under low normal load are being studied in order to develop lubrication methods suitable for micro-machines. Special mechanical test methods for the materials used in micro-machines are under development. The effects of micro-structure, micro-defects, and surface layers on mechanical properties as well as the characteristics of smart materials suitable for micro-machines are being studied. Viscous forces usually dominate in micro-scale flow. Therefore, in order to control fluid viscosity by using liquid-vapor phase changes, a new type of micro pump, which has no moving parts is currently being developed.