Dec 7 (Mon)	Dec 8 (Tue)	Dec 9 (Wed)
Morning	Oral session 1 Microfactory - Concept Establishment I	Oral session 4 Microfactory - Assemble and Innovative Process	Technical Tour free
	Oral session 2 Microfactory - Concept Establishment II
After noon	Oral session 3 Microfactory and Micromachine	Oral session 5 Micro Assembly and Manipulation I	-
	Poster session	Oral session 6 Micro Assembly and Manipulation II
		Oral session 7 Microfluidic Systems
Evening	Evening discussion	Banquet	-

8:50-9:20

Registration

Room 1

9:20-9:30

Opening Address

Yoshinori Nakazawa, General Chairman

Session 1:Microfactory - Concept Establishment I

Room 1

Chairpersons: G. Beardmore (SmithIndustries Aerospace, UK) and Y. Enomoto (MEL/AIST, Japan)

9:30-10:00

O11 : Microfactory andMicrolathe
Tokio Kitahara (Shonan Institute of Technology, Japan), KiwamuAshida, Makoto Tanaka, Naotake Oyama, Yoshinori Nakazawa (MechanicalEngineering Laboratory/AIST, Japan), Yuichi Ishikawa (MicromachineCenter, Japan)

10:00-10:30

O12 : Miniature Factories forPrecision Assembly
Ralph Hollis, Jay Gowdy (Carnegie Mellon Univ., USA)

Coffee Break

Session 2:Microfactory - Concept Establishment II

Room 1

Chairpersons: W. Schaefer(Fraunhofer-Institute, Germany) and M. Tanaka (MEL/AIST, Japan)

10:45-11:15

O21 : Nano Manufacturing World asa Desk-top Factory
Yotaro Hatamura (Univ. of Tokyo, Japan)

11:15-11:45

O22 : Research on Leading Designand Mode Study of Microfactory
S.Wakuri, N. Nakajima, T. Murakami (Univ. of Tokyo,Japan)

11:45-12:15

O23 : A Single Wafer Desk Top FabLine for Rapid Prototyping of MEMS Devices
Geoff Beardmore (Smiths Industries Aerospace, UK)

Lunch

Session 3:Microfactory and Micromachine

Room 1

Chairpersons: A. Paulus (ACLARABioSciences, USA) and T. Ataka (Seiko Instruments, Japan)

13:30-14:00

O31 : Precise Micromachining andNanomachining
Masayoshi Esashi (Tohoku Univ., Japan)

14:00-14:30

O32 : Microfactory on a Chip
O. T. Guenat (Univ. of Neuchatel, Switzerland), T. Hirata, T.Akashi (Sumitomo Heavy Industries, Ltd., Japan), M.-A. Gretillat(Univ. of Neuchatel, Switzerland), M. Boillat, B. H. van der Schoot(Seyonic SA), K. Fluri, E. Verpoorte, N. F. de Rooij (Univ. ofNeuchatel, Switzerland)

14:30-14:50

O33 : The Microfactory System inNational R&D Propject of MITI
Kazuyoshi Furuta (Micromachine Center (Seiko InstrumentsInc.), Japan), Yuichirou Takahashi, Yoshikazu Mikuriya, YuichiIshikawa (Micromachine Center, Japan)

Coffee Break

PosterSession

Hall

15:00-17:00

P11 : The Application ofElectrochemical Machining for Microfactory
Masayuki Suda, Reiko Irie, Kazuyoshi Furuta, ToshihikoSakuhara, Tatsuaki Ataka (Seiko Instruments Inc., Japan)

P12 : Microfluid Operation DevicesUsing a Surface Treatment Technique
Takeshi Harada, Yasuhiro Yoshimura, Yoshishige Endou, AkiomiKouno (Hitachi, Ltd., Japan)

P13 : Development ofMicro-arm
Hideaki Oku (FANUC Ltd., Japan)

P14 : Micro-servo Actuators forMicro-factory Systems
Takefumi Kabashima, Tomohiro Matsuo, Kazunari Matsuzaki(YASKAWA ELECTRIC Co., Japan)

P15 : Environmental RecognitionDevices for Microfactory
Osamu Tohyama, S. Maeda, K. Abe, M. Murayama, T. Tachibana(Mitsubishi Cable Industries, Ltd., Japan)

P16 : A Method of Dispensing forCoating Device in Micro-factory
Koichi Irisa, Takashi Kawano, Wataru Nogimori, YoshihiroNaruse (AISIN COSMOS R&D Co., Ltd., Japan)

P17 : Micro-parts ConveyanceUnit
Haruo Nakazawa, Yasumasa Watanabe, Osamu Morita, Masaharu Edo,Eiichi Yonezawa (Fuji Electric Corporate Research and Development,Ltd., Japan)

P21 : Studies onMicro-Liquid-Systems
Yoshikazu Utsumi, Yoshikazu Mikuriya (Micromachine Center,Japan), Makoto Tanaka (Mechanical Engineering Laboratory/AIST,Japan)

P22 : Quick-Response Dynamic FocusingLens for Microfactory
Nobuaki Kawahara, Takashi Kaneko (DENSO Research Laboratories,Japan)

P23 : Diffusion-type Micro MixerDriven by PZT Microactuator
Hiroshi Goto (OMRON Co., Japan), Zhen Yang (MechanicalEngineering Laboratory/AIST, Japan), Mikio Matsumoto, Tsuneji Yada(OMRON Co., Japan)

P24 : Electrophoresis Module forSeparation of Components
Etsuo Shinohara, Nobuyuki Tajima, Hirobumi Suzuki, Ryo Ohta,Kyoichi Kano (Olympus Optical Co., Ltd., Japan)

P25 : Analytical Device for LiquidUsing Near-field Optics
Toyoaki Uchida, Nobuyuki Kasama, Takashi Niwa, YasuyukiMitsuoka, Kunio Nakajima, Kazuyoshi Furuta, Toshihiko Sakuhara (SeikoInstruments Inc., Japan)

P31 : Evaluation of EconomicPerformance of the Prototype Micro-factory by Production LineSimulation
S. Sado, M. Tanaka, Y. Tatsue (Mechanical EngineeringLaboratory/AIST, Japan), Y. Ishikawa and K. Furuta (MicromachineCenter, Japan)

P32 : Systematic Approach forDesigning a Miniature Machine Tool
- Robustness Evaluation of the Micro Lathe Design -
Nozomu Mishima (Mechanical Engineering Laboratory/AIST,Japan), Tokio Kitahara (Shonan Institute of Technology, Japan), KazuoMori (Mechanical Engineering Laboratory/AIST, Japan)

P33 : Nano-factory Based on ScanningForce Microscopes
Jiaru Chu, Ryutaro Maeda (Mechanical EngineeringLaboratory/AIST, Japan), Toshihiro Itoh, Kenichi Kataoka, TadatomoSuga (Tokyo Univ., Japan)

P41 : Fast Tool Servo System and itsApplication to Three-dimensional Fine Surface Figures
Yuichi Okazaki (Mechanical Engineering Laboratory/AIST,Japan)

P42 : Room Temperature Bonding ofSubstrate Materials for Integration of Micro Systems
Hideki Takagi, Ryutaro Maeda (Mechanical EngineeringLaboratory/AIST, Japan), Tadatomo Suga (Univ. of Tokyo, Japan)

P43 : Rapid Micro Production Based onan Ultra-fine Particle Direct Deposition
Jun Akedo, Masaaki Ichiki, Ryutaro Maeda (MechanicalEngineering Laboratory/AIST, Japan)

P44 : Nanometer Scale MachiningSystem Utilizing Mechanism of Friction Force Microscope
Kiwamu Ashida (Mechanical Engineering Laboratory/AIST, Japan),Noboru Morita, Yoshitaro Yoshida (Chiba Univ., Japan)

P45 : Concept and Realization ofMicro Mechanical Manufacturing System
Kazuhisa Ishii, Masayuki Nakao, Hidetoshi Amano, YotaroHatamura (Univ. of Tokyo, Japan)

P51 : Pumping Mechanism Using PhaseChanges of a Fluid within a Sequentially Heated Capillary
Kouichi Ozaki, Shigeru Sunada, Makoto Tanaka (MechanicalEngineering Laboratory/AIST, Japan)

P52 : Genom Microfactory
Yoshinobu Baba (Univ. of Tokushima, Japan)

P53 : Microfabricated OxygenElectrode Arrays and Their Application for EnvironmentalMonitoring
Zhen Yang (Mechanical Engineering Laboratory/AIST, Japan),Hiroaki Suzuki (Univ. of Tsukuba, Japan), Satoshi Sasaki, Isao Karube(Univ. of Tokyo, Japan) and Ryutaro Maeda (Mechanical EngineeringLaboratory/AIST, Japan)

EveningDiscussion

Room 2

17:00-18:30

"How do microfactories stimulate the creation of newindustries?"

Chairpersons: R. L. Hollis (CarnegieMellon Univ., USA) and Y. Enomoto (MEL/AIST, Japan)

Panelists: T. Ataka (Seiko Instruments,Japan), S. Shoji (Waseda Univ., Japan), N. de Rooij (Univ. ofNeuchatel, Switzerland), T. Arai (Osaka Univ., Japan), B. Nelson(Univ. of Minnesota, USA) and T. Sato (Univ. of Tokyo, Japan)

* * * * * * * * * *

Session 4:Microfactory - Assemble and Innovative Process

Room 1

Chairpersons: B. Michel (FraunhoferInstitute, Germany) and Y. Okazaki (MEL/AIST, Japan)

9:00-9:30

O41 : Automatic Pick and Placefor a Micro Object with High Precision Based on Micro Physics underSEM
Shigeki Saito, Hideki Miyazaki (Univ. of Tokyo, Japan), YasushiTomisawa (Toshiba Co., Japan), Takeshi Kasaya (Tokyo EngineeringUniv., Japan), Tomomasa Sato (Univ. of Tokyo, Japan)

9:30-10:00

O42 : Microfactory Cells forMetal Forming and Micromaterials Testing
Yasunori Saotome (Gunma Univ., Japan), Toshihisa Hatori,Takeshi Okamoto, Hiroyuki Iwazaki (Graduate school of Gunma Univ.,Japan)

10:00-10:30

O43 : A Micro-fab for theMicro-assembly of Optical Lenses
Wolfgang Schaefer, Ralf Grimme, Dirk Schlenker, Achim Stock,Matthias Schuenemann (Fraunhofer-Institut for ManufacturingEngineering and Automation (FhG-IPA), Germany)

Coffee Break

Session 5: MicroAssembly and Manipulation I

Room 2

Chairpersons: H. Bleuler (DMT-ISR,EPFL, Switzerland) and T. Arai (Osaka Univ., Japan)

10:45-11:15

O51 : Micro Assembly SystemHaving Tow-Fingered Micro Hand and Adhesive Bonding Device
Tamio Tanikawa (Mechanical Engineering Laboratory/AIST,Japan), Tatsuo Arai (Osaka Univ., Japan)

11:15-11:45

O52 : Reliability Aspects ofMicroassembly in Microfactories
B. Michel, V. Grosser (Fraunhofer Institute for Reliabilityand Microintegration (IZM) Berlin, Germany)

11:45-12:15

O53 : Issues in Vision and ForceSensing for Micromanipilation
Bradley J. Nelson, Bharath Mukundakrishnan, Yu Zhou,Barmeshwar Vikramaditya (Univ. of Minnesota, USA)

Lunch

Session 6: MicroAssembly and Manipulation II

Room 1

Chairpersons: B. J. Nelson (Univ. ofMinnesota, USA) and T. Tanikawa (MEL/AIST, Japan)

13:30-14:00

O61 : 3D Bio-MicromanipulationSystem
Fumihito Arai (Nagoya Univ., Japan), Toshio Fukuda (NagoyaUniv., Japan)

14:00-14:30

O62 : Precise Miniature Robotsand Desktop Flexible Production
Hisayuki Aoyama (Univ. of Electro-Communications, Japan)

14:30-15:00

O63 : Microfactory andMicrorobotics Activities in Europe
H. Bleuler, J.-M. Breguet (DMT-ISR, EPFL, Switzerland)

Coffee Break

Session 7:Microfluidic Systems

Room 1

Chairpersons: N. de Rooij (Univ. ofNeuchatel, Switzerland) and R. Maeda (MEL/AIST, Japan)

15:30-16:00

O71 : Micromachine Technologiesand Micro Flow Devices for Chemical and Bio-chemical Micro FlowSystems
Shuichi Shoji (Waseda Univ., Japan)

16:00-16:30

O72 : Integrated CapillaryElectrophoresis for Microfabricated Single and Multi-channel Glassand Plastic Devices
Aran Paulus, Stephen J. Williams, Hongdong Tan, Alexander P.Sassi, Pin Kao, Indrid Cruzado, Herbert H. Hooper (ACLARABioSciences, USA)

16:30-17:00

O73 : MicromachinedBi-directional Liquid Pump with Thermally Controlled DynamicValves
Sohei Matsumoto (Mechanical Engineering Laboratory/AIST,Japan), Andreas Klein (Dresden Univ. of Tech., Germany), RyutaroMaeda, Yuji Enomoto (Mechanical Engineering Laboratory/AIST,Japan)

* * * * * Closing * * * * *

(1) Central R&D Laboratory, OMRON Corporation (Tsukuba)
(2) Mechanical Engineering Laboratory, AIST, MITI (Tsukuba)

Tour Bus Route and Time Table

* * * * * * * * * *

Useful Addresses and PhoneNumbers

(a) General Secretariat of IWMF '98

Makoto Tanaka, 1-2 Namiki, Tsukuba Science City, Ibaraki305-8564, Japan
+81-(0)XXX-XX-7059 (Office)
iwmf@mel.go.jp

(b) Dai-ichi Hotel

1 Azuma, Tsukuba Science City, Ibaraki 305-0031, Japan
+81-(0)298-52-1112

(c) Sakura-kan

1-1-4 Higashi (B-Area, AIST Research Center), Tsukuba ScienceCity, Ibaraki 305, Japan
+81-(0)XXX-XX-2395